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Merck

760404

Tantalum(V) ethoxide

packaged for use in deposition systems

Synonym(s):

PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide

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About This Item

Linear Formula:
Ta(OC2H5)5
CAS Number:
6074-84-6
Molecular Weight:
406.25
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
329766860
EC Number:
228-010-2
Beilstein/REAXYS Number:
3678999
MDL number:
MFCD00049785

Key Documents

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InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5

InChI key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

SMILES string

CCO[Ta](OCC)(OCC)(OCC)OCC

form

liquid

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Application

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

pictograms

Flame
GHS02

signalword

Warning

hcodes

H226

Hazard Classifications

Flam. Liq. 3

Storage Class

3 - Flammable liquids

wgk

WGK 1

flash_point_f

84.2 °F - closed cup

flash_point_c

29 °C - closed cup

Regulatory Listings

Regulatory Listings are mainly provided for chemical products. Only limited information can be provided here for non-chemical products. No entry means none of the components are listed. It is the user’s obligation to ensure the safe and legal use of the product.

Group 4: Flammable liquids + Type 2 petroleums + Hazardous rank III + Water insoluble liquid

fsl

760404-VAR: + 760404-BULK: + 760404-25G:

jan

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Certificates of Analysis (COA)

Lot/Batch Number
SHBB2425V

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