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760404

Tantalum(V) ethoxide

Name: Tantalum(V) ethoxide
Brand: ALDRICH

packaged for use in deposition systems

Synonym(s):

PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide

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About This Item

Linear Formula:

Ta(OC₂H₅)₅

CAS Number:

6074-84-6

Molecular Weight:

406.25

UNSPSC Code:

12352103

NACRES:

NA.23

PubChem Substance ID:

329766860

EC Number:

228-010-2

Beilstein/REAXYS Number:

3678999

MDL number:

MFCD00049785

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Properties

form

liquid

refractive index

n20/D 1.487 (lit.)

bp

155 °C/0.01 mmHg (lit.)

mp

21 °C (lit.)

density

1.566 g/mL at 25 °C (lit.)

SMILES string

CCO[Ta](OCC)(OCC)(OCC)OCC

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5

InChI key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

Description

Application

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

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Pictograms

GHS02

Signal Word

Warning

Hazard Codes

H226

Precautionary Statements

P210 - P233 - P240 - P241 - P242 - P243

Hazard Classifications

Flam. Liq. 3

Storage Class

3 - Flammable liquids

WGK

WGK 1

Flash Point (°F)

84.2 °F - closed cup

Flash Point (°C)

29 °C - closed cup

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