379212
Hexamethyldisilazane
ReagentPlus®, 99.9%
Synonym(s):
1,1,1,3,3,3-Hexamethyldisilazane, HMDS
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About This Item
Linear Formula:
(CH3)3SiNHSi(CH3)3
CAS Number:
Molecular Weight:
161.39
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
EC Number:
213-668-5
Beilstein/REAXYS Number:
635752
MDL number:
product line
ReagentPlus®
assay
99.9%
form
liquid
refractive index
n20/D 1.407 (lit.)
bp
125 °C (lit.)
SMILES string
C[Si](C)(C)N[Si](C)(C)C
InChI
1S/C6H19NSi2/c1-8(2,3)7-9(4,5)6/h7H,1-6H3
InChI key
FFUAGWLWBBFQJT-UHFFFAOYSA-N
General description
Hexamethyldisilazane (HDMS) is an organoslicon compound. HDMS is a colorless liquid used as a reagent and precursor in organic synthesis and organometallic chemistry. It is also used as a sol-gel precursor to fabricate thin films for semiconductor devices.
Application
Hexamethyldisilazane can be used:
- As a precursor to fabricate multilayer quantum dot light-emitting diodes.
- To modify dielectric surfaces of organic thin film transistors.
- To fabricate superhydrophobic coatings on epoxy resins.
- For the silylation of alcohols and phenols.
Legal Information
ReagentPlus is a registered trademark of Merck KGaA, Darmstadt, Germany
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Danger
Hazard Classifications
Acute Tox. 3 Dermal - Acute Tox. 4 Inhalation - Acute Tox. 4 Oral - Aquatic Chronic 3 - Flam. Liq. 2
Storage Class
3 - Flammable liquids
wgk
WGK 2
flash_point_f
52.5 °F - closed cup
flash_point_c
11.4 °C - closed cup
ppe
Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
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Hexamethyldisilazane-mediated full-solution-processed inverted quantum dot-light-emitting diodes
Yan Fu, et al.
Journal of Materials Chemistry, 5, 522-526 (2017)
Ar/HMDS Plasma Jet as a Tool for Superhydrophobic Coatings on Epoxy Resin
Jingang Wang, et al.
Nanotechnology, IEEE Transactions, 50, 1867-1874 (2022)
D F Bray et al.
Microscopy research and technique, 26(6), 489-495 (1993-12-15)
Three different drying methods, critical-point drying (CPD), Peldri II, and hexamethyldisilazane (HMDS), were compared using representative animal (rat kidney, trachea, duodenum, lung, and red blood cells) and plant (leaves from ten species of monocotyledons and dicotyledons) specimens. All three drying