Atomic layer deposition and properties of ZrO

Beilstein journal of nanotechnology (2018-02-15)

Kristjan Kalam, Helina Seemen, Peeter Ritslaid, Mihkel Rähn, Aile Tamm, Kaupo Kukli, Aarne Kasikov, Joosep Link, Raivo Stern, Salvador Dueñas, Helena Castán, Héctor García