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Merck

730734

Trimethylgallium

packaged for use in deposition systems

Synonyme(s) :

Me3Ga, TMGa, TMG

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A propos de cet article

Formule linéaire :
Ga(CH3)3
Numéro CAS:
Poids moléculaire :
114.83
NACRES:
NA.23
PubChem Substance ID:
UNSPSC Code:
12352103
EC Number:
215-897-6
MDL number:
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Nom du produit

Trimethylgallium, packaged for use in deposition systems

InChI key

XCZXGTMEAKBVPV-UHFFFAOYSA-N

InChI

1S/3CH3.Ga/h3*1H3;

SMILES string

C[Ga](C)C

form

liquid

reaction suitability

core: gallium

bp

92.5 °C/760 mmHg (lit.)

mp

-15.8 °C (lit.)

density

1.132 g/mL at 25 °C

Quality Level

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Application

Trimethylgallium can be used as:
  • A precursor to synthesize β-gallium oxide (β-Ga₂O₃) thin films for high-power electronic devices, offering superior breakdown voltage and thermal stability.
  • A precursor for epitaxial growth of gallium nitride (GaN) in blue LEDs and laser diodes, enabling high-brightness displays and optical communication systems.
  • A component in colloidal quantum dot synthesis for tunable near-infrared LEDs in biomedical imaging and telecommunications.
  • A source material for gallium arsenide (GaAs) layers in high-electron-mobility transistors (HEMTs), critical for 5G millimeter-wave amplifiers.

General description

Trimethylgallium (TMGa) [Ga(CH3)3] is a high-purity (99.9999%), colorless, and pyrophoric organometallic compound widely used as a key precursor in metal-organic chemical vapor deposition (MOCVD) for semiconductor manufacturing. Its high volatility and metal-organic reactivity make it essential for producing gallium-containing thin films in optoelectronics, photovoltaics, and high-frequency devices. TMGa′s ultra-low impurity levels ensure performance consistency in applications such as LEDs, laser diodes, and high-electron-mobility transistors (HEMTs). Recent advancements have also extended its role to quantum dot synthesis and photonic integrated circuits for energy-efficient and IoT-enabled technologies.

pictograms

FlameCorrosion

signalword

Danger

Hazard Classifications

Eye Dam. 1 - Pyr. Liq. 1 - Skin Corr. 1B - Water-react 1

supp_hazards

Classe de stockage

4.2 - Pyrophoric and self-heating hazardous materials

wgk

WGK 3


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  4. What is the Department of Transportation shipping information for this product?

    Transportation information can be found in Section 14 of the product's (M)SDS.To access the shipping information for this material, use the link on the product detail page for the product. 

  5. Can the empty deposition cylinders be refilled?

    Yes, we are able to refill these cylinders through our SAFC Hitech group.  Please contact our Technical Service department by email at techserv@sial.com, and they will forward you to the appropriate SAFC Hitech representative for a quote.

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