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Merck

760404

Tantalum(V) ethoxide

packaged for use in deposition systems

Synonym(s):

PET, Pentaethoxytantalum, Pentaethyl tantalate, Tantalum pentaethoxide

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About This Item

Linear Formula:
Ta(OC2H5)5
CAS Number:
Molecular Weight:
406.25
UNSPSC Code:
12352103
NACRES:
NA.23
PubChem Substance ID:
EC Number:
228-010-2
Beilstein/REAXYS Number:
3678999
MDL number:

Product Name

Tantalum(V) ethoxide, packaged for use in deposition systems

InChI

1S/5C2H5O.Ta/c5*1-2-3;/h5*2H2,1H3;/q5*-1;+5

InChI key

HSXKFDGTKKAEHL-UHFFFAOYSA-N

SMILES string

CCO[Ta](OCC)(OCC)(OCC)OCC

form

liquid

refractive index

n20/D 1.487 (lit.)

bp

155 °C/0.01 mmHg (lit.)

mp

21 °C (lit.)

density

1.566 g/mL at 25 °C (lit.)

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Application

Tantalum(V) ethoxide precursor is used to deposit ultra thin films of Tantalum oxide and other tantalum containing films by atomic layer deposition and chemical vapor deposition methods

pictograms

Flame

signalword

Warning

hcodes

Hazard Classifications

Flam. Liq. 3

Storage Class

3 - Flammable liquids

wgk

WGK 1

flash_point_f

84.2 °F - closed cup

flash_point_c

29 °C - closed cup


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