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Merck

730734

トリメチルガリウム

packaged for use in deposition systems

別名:

TMG

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この商品について

化学式:
Ga(CH3)3
CAS番号:
1445-79-0
分子量:
114.83
NACRES:
NA.23
PubChem Substance ID:
329764589
UNSPSC Code:
12352103
EC Number:
215-897-6
MDL number:
MFCD00014841

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InChI key

XCZXGTMEAKBVPV-UHFFFAOYSA-N

InChI

1S/3CH3.Ga/h3*1H3;

SMILES string

C[Ga](C)C

Quality Level

100

reaction suitability

core: gallium

bp

92.5 °C/760 mmHg (lit.)

mp

-15.8 °C (lit.)

density

1.132 g/mL at 25 °C

関連するカテゴリー

General description

Trimethylgallium (TMGa) [Ga(CH3)3] is a high-purity (99.9999%), colorless, and pyrophoric organometallic compound widely used as a key precursor in metal-organic chemical vapor deposition (MOCVD) for semiconductor manufacturing. Its high volatility and metal-organic reactivity make it essential for producing gallium-containing thin films in optoelectronics, photovoltaics, and high-frequency devices. TMGa′s ultra-low impurity levels ensure performance consistency in applications such as LEDs, laser diodes, and high-electron-mobility transistors (HEMTs). Recent advancements have also extended its role to quantum dot synthesis and photonic integrated circuits for energy-efficient and IoT-enabled technologies.

Application

Trimethylgallium can be used as:
  • A precursor to synthesize β-gallium oxide (β-Ga₂O₃) thin films for high-power electronic devices, offering superior breakdown voltage and thermal stability.
  • A precursor for epitaxial growth of gallium nitride (GaN) in blue LEDs and laser diodes, enabling high-brightness displays and optical communication systems.
  • A component in colloidal quantum dot synthesis for tunable near-infrared LEDs in biomedical imaging and telecommunications.
  • A source material for gallium arsenide (GaAs) layers in high-electron-mobility transistors (HEMTs), critical for 5G millimeter-wave amplifiers.

pictograms

FlameCorrosion
GHS02,GHS05

signalword

Danger

supp_hazards

EUH014

保管分類

4.2 - Pyrophoric and self-heating hazardous materials

wgk

WGK 3

Hazard Classifications

Eye Dam. 1 - Pyr. Liq. 1 - Skin Corr. 1B - Water-react. 1

適用法令

試験研究用途を考慮した関連法令を主に挙げております。化学物質以外については、一部の情報のみ提供しています。 製品を安全かつ合法的に使用することは、使用者の義務です。最新情報により修正される場合があります。WEBの反映には時間を要することがあるため、適宜SDSをご参照ください。

730734-10G: + 730734-VAR: + 730734-BULK:

jan

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試験成績書（COA）

Lot/Batch Number
HHBB6791V
HHBB6790V
HHBB6070V
HHBB6461V
HHBB5360V

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